Archived Materials:
SEMASPECS

NOTE: The following materials are either obsolete or superseded by other documents and are provided for reference only.

Introduction

This listing contains all SEMASPECS published by SEMATECH and a status on those that have been transferred to industry standards organizations for development as industry standards. SEMASPECS are SEMATECH specifications, guidelines, and application notes developed internally or through SEMATECH task forces. These documents represent varying levels of consensus and should not be construed as industry standards.

Mass Flow Controllers

The following Mass Flow Controller documents are in development as industry standards by SEMI (Semiconductor Equipment and Materials International). When available, adherence to the SEMI standard is recommended.

92071220B-STD	SEMASPEC Guide to Provisional Test Methods for MFCs	04-Mar-1993
92071221B-STD	MFC: Accuracy, Linearity, Repeatability, Hysteres	04-Mar-1993
92071222B-STD	MFC: Reproducibility and Zero Drift	04-Mar-1993
92071223B-STD	MFC: Warm-up Time	04-Mar-1993
92071224B-STD	MFC: Determining Reliability	04-Mar-1993
92071225B-STD	MFC: Calibration Accuracy and Conversion Factors	04-Mar-1993
92071226B-STD	MFC: Particle Contribution	04-Mar-1993
92071227B-STD	MFC: Moisture, Oxygen, Hydrocarbon Contribution	04-Mar-1993
92071228B-STD	MFC: Performance Char. from Ambient and Gas Temp	04-Mar-1993
92071229B-STD	MFC: Pressure Effects on Indicated & Actual Flow	04-Mar-1993
92071230B-STD	MFC: Steady-State Supply Voltage Effects	04-Mar-1993
92071231B-STD	MFC: Evaluating Electromagnetic Susceptibility	04-Mar-1993
92071232B-STD	MFC: Attitude Sensitivity	04-Mar-1993
92071233B-STD	MFC: Corrosion Resistance	04-Mar-1993

Test Methods for Gas Distribution System Components

90120390B-STD	Test Method for Particle Contribution This document has been adopted as ASTM F1394 and is provided for information only. Adherence to the industry standard is recommended.	01-Apr-1993
90120395B-STD	Test Method for Cycle Life of Automatic Valves This document has been adopted as ASTM F1373 and is provided for information only. Adherence to the ASTM standard is recommended.	01-Apr-1993
90120396B-STD	Test Method for Total Hydrocarbon Contribution This document has been revised and adopted as ASTM F1397 and is provided for information only. Adherence to the ASTM standard is recommended.	01-Apr-1993
90120401B-STD	Test Method for SEM Analysis of Metallic Surface This document has been revised and adopted as ASTM F1372 and is provided for information only. Adherence to the ASTM standard is recommended.	01-Apr-1993
90120402B-STD	Test Method for EDX Analysis of Metallic Surface This document has been revised and adopted as ASTM F1375 and is provided for information only. Adherence to the ASTM standard is recommended.	01-Apr-1993

Documents in Development

The following documents are in development for industry standards by SEMI. When available, the SEMI test method should supercede the SEMASPEC.

90120391B-STD	Test Method for Helium Leak Rate	01-Apr-1993
90120392B-STD	Test Method for Regulator Performance Characteristics	01-Apr-1993
90120393B-STD	Test Method for Filter Flow Pressure Drop Curves	01-Apr-1993
90120394B-STD	Test Method for Valve Flow Coefficients	01-Apr-1993
90120397B-STD	Test Method for Moisture Contribution	01-Apr-1993
90120398B-STD	Test Method for Oxygen Contribution	01-Apr-1993
90120399B-STD	Test Method for Ionic/Organic Extractables	01-Apr-1993
90120400B-STD	Test Method for Surface Roughness	01-Apr-1993
90120404B-STD	Test Method for Surface Roughness by STM	01-Apr-1993
91060573B-STD	Test Method for AES Analysis of Surface & Oxide	01-Apr-1993
91060574B-STD	Test Method for Metallurgical Analysis	01-Apr-1993
93021510A-STD	Test Method for Particle Contribution by Regulator	01-Apr-1993
93021511A-STD	Test Method for Particle Contribution by Filters	01-Apr-1993

Contamination Control

92051107A-STD	SEMATECH Guide for Contamination Control in the Design, Assembly, and Delivery of Semiconductor Manufacturing Equipment	21-Aug-1992
	SEMATECH has granted copyright permission to SEMI to develop this document for industry standards. Portions of this document have been incorporated into the SEMI Tool Accommodation Standards.
94052358A-STD	An Extractive Method for Determining Particulate Contamination Levels of Wafer Carriers Using Ultrasonic Extraction: SEMASPEC	13-Oct-1994
94022208A-XFR	Development of Standard Outgassing Techniques for Detecting Volatile Organic Compounds from Polymer Materials Used in Microenvironments	07-Apr-1994

UPW Component Test Methods

Note: These test methods have not been validated through the SEMATECH project.

Permission to develop the following SEMASPECs for industry standards has been given to SEMI. The SEMI standard, when available, should supercede the SEMASPEC.

Contact SEMI for a status on the standards development.

92010933B-STD	Guide to Test Methods for UPW Dist. System Compnt.	26-Jun-1992
92010934B-STD	Test Method: Sample Prep. for Chemical Testing	26-Jun-1992
92010935B-STD	Test Method: Electrical Resistivity of UPW	26-Jun-1992
92010936B-STD	Test Method: Leachabable Trace Inorganics	26-Jun-1992
92010937B-STD	Test Method: Eval of Bulk Polymer Samples	26-Jun-1992
92010938B-STD	Test Method: Bulk Trace Metals in Polymer Matls.	26-Jun-1992
92010939B-STD	Test Method: Eval Bulk Polymer Samples (DSC, TGA)	26-Jun-1992
92010940B-STD	Test Method: Water Retent. Capac. of Ion-Exchange	26-Jun-1992
92010941B-STD	Test Method: Pressure Cycle Testing Filter Cart.	26-Jun-1992
92010942B-STD	Test Method: Flow Coefficient of Filter Cartridg.	26-Jun-1992
92010943B-STD	Test Method: Pressure Leak Testing Filters	26-Jun-1992
92010944B-STD	Test Method: Pressure Proof Testing Filters	26-Jun-1992
92010945B-STD	Test Method: Determining Operational Pressure	26-Jun-1992
92010946B-STD	Test Method: Seat Leakage of Control Valves	26-Jun-1992
92010947B-STD	Test Method: Leak Testing Tube Fitting Connections	26-Jun-1992
92010948B-STD	Test Method: Hydraulic Burst Pressure of Component	26-Jun-1992
92010949B-STD	Test Method: Particle Contribution & Retention	26-Jun-1992
92010950B-STD	Test Method: Visual Charact. of Surface Roughness	26-Jun-1992
92010951B-STD	Test Method: Optical Analysis of Plastic Surface	26-Jun-1992
92010952B-STD	Test Method: Determining Surface Roughness (AFM)	26-Jun-1992
92010953B-STD	Test Method for Surface Roughness (STM Method)	26-Jun-1992
92010954B-STD	Test Method: Surface Roughness (Optical Profiling)	26-Jun-1992
92010955B-STD	Test Method: Analyzing Plastic Surface Condition	26-Jun-1992
92010956B-STD	Test Method: Surface Comp. & Chemical Binding	26-Jun-1992
92010957B-STD	Test Method: Optical Analy. of Ion-Exchange Resins	26-Jun-1992
92010958B-STD	Test Method: Surface Associated Biofilms	26-Jun-1992

Information and Control Systems

95042782A-ENG	SEMATECH Stepper Specific Equipment Model (SSEM) SEMI has been given copyright permission to develop this document as an industry standard.
95042793A-ENG	SEMATECH Metrology Specific Equipment Model (MSEM) SEMI has been given copyright permission to develop this document as an industry standard.
95042797A-ENG	SEMATECH Inspection/Review Specific Equipment Model (ISEM) SEMI has been given copyright permission to develop this document as an industry standard.
94102567A-STD	Device Interoperability Guideline for Sensors, Actuators, and Controllers
93061697J-ENG	SEMATECH Computer Integrated Manufacturing (CIM) Framework Specification, Version 2.0 SEMI has been given copyright permission to develop this document as an industry standard.
93031573B-STD	SEMASPEC GEM Purchasing Guidelines 2.0
92061179A-ENG	SCC User Interface Style Guide 1.0 SEMI Japan and JEIDA have been given copyright permission to jointly develop this document as an industry standard.

Permission to develop the following documents for industry standards has been given to SEMI. The SEMI standard, when available, should supercede the SEMASPEC.

Archived Materials: SEMASPECS