ESH Documentation for Suppliers
The documents in the section below were used in the I300I Tool Demonstration process to help ensure conformance with SEMI S2, SEMI S8, progress toward CE Marking, and status of emissions characterization.
- Guidelines for International 300 mm Initiative (I300I) Environmental, Safety & Health (ESH) Equipment Specific Environmental Impact [pdf]
- I300I Environment, Safety, and Health Overview Presentation [pdf]
- Pre-EMA ESH Expectations Supplier Letter [pdf]
- SEMATECH Application Guide for SEMI S2-93 and SEMI S8-95, Part 1 [pdf] (NOTE: this guide is superceded by SEMI S2, S8, S14, and S22)
- SEMATECH Application Guide for SEMI S2-93 and SEMI S8-95, Part 2 [pdf] (NOTE: this guide is superceded by SEMI S2, S8, S14, and S22)
- Guidelines for Environmental Characterization Semiconductor Equipment
- Emissions Characterization Package [pdf]
- Emissions Characterization Package, Revision Summary of Changes [pdf]
- Assistance document: Exhaust Evaluation and Optimization Package [pdf]
- Environment,
Safety, and Health (ESH) Metrics for Semiconductor
Manufacturing Equipment (SME)