Archived Materials:
300
mm Equipment, Factory, and Manufacturing
Systems Guidelines
NOTE: The following materials are either obsolete or superseded by other documents and are provided for reference only.
| Document # | Document Title | Publication Date |
|---|---|---|
| 00053953D-XFR | 300 mm Equipment Base Software Functionality Requirements - Fixed Buffer and Internal buffer Type Equipment: Selete/ISMT CIM Base Functionality Req, Phase 1 Rev, 2.0 | 21 Dec 2001 |
| 00114018B-XFR | 300 mm Equipment Base Software Functionality Requirements - Error Handling and Extended Scenarios: Selete/ISMT CIM Base Functionality Req., Phase 2, Rev 2.0 | 21 Dec 2001 |
| 01034094A-TR | International SEMATECH (ISMT)/Selete Unified Checklist for Hardware | 20 Apr 2001 |
| Testing
Base Operational Scenarios -
(pdf) Draft Selete/ISMT CIM Base Functionality Requirements Collaboration, Phase 3 |
22 Dec 2000 | |
| 99123857B-ENG | Unified Equipment Performance Metrics for 130 nm Technology | 6 Jul 2000 |
| 00063970A-ENG | 300 mm Automation Software Compliance Testing | 30 Jun 2000 |
| 00053952A-XFR | Equipment Performance Management User Requirements | 12 Jun 2000 |
| 00023913A-TR | Equipment Performance Metrics for 300mm Backend Equipment | 12 May 2000 |
| 97063311G-ENG | I300I Factory Guidelines (Version 5.0) | 28 Apr 2000 |
| 98063534D-ENG | CIM Global Joint Guidance for 300 mm Semiconductor Factories | 18 Apr 2000 |
| Scheduler/Dispatcher User Requirements (pdf) | 29 Feb 2000 | |
| 00023901A-ENG | Backend Wafer Carrier Global Joint Guidance for 300mm Semiconductor Factories | 29 Feb 2000 |
| 99013659C-ENG | 300 mm Integrated Vision for Semiconductor Factories, Release 3 | 29 Dec 1999 |
| User
System Requirements Document
(USRD) for FOUP-to-Loadport Interoperability (pdf) |
29 Nov 1999 | |
| 99093826A-TR | Unified Equipment Performance Metrics for 0.18 micron Technology | 18 Nov 1999 |
| 99073793A-TR | Automated Material Handling System (AMHS) Framework Document (Version 1.0) | 9 Sep 1999 |
| 97123416B-TR | Metrics for 300 mm Automated Material Handling Systems (AMHS) and Production Equipment Interfaces | 15 Dec 1998 |
| Backend Global Joint Guidance for 300 mm Semiconductor Factories (pdf) | Dec 1998 | |
| 97093360C-ENG | 180 nm Equipment Performance Metrics - Revision 1 | 31 Aug 1998 |
| 300 mm Global Joint Guidance CIM Phase II Report (pdf) | 30 Apr 1998 | |
| 97113407A-ENG | Silicon Test Wafer Specification for 180 nm Technology | 3 Dec 1997 |
| 97113406A-ENG | Unified Equipment Performance Metrics for 0.25 micron Technology | 1 Dec 1997 |
| 97033265C-ENG | Equipment Performance Metrics, Revision 3 | 15 Jul 1997 |
| Global Joint Guidance for 300 mm Semiconductor Factories (pdf) | Jul 1997 | |
| 97063306A-TR | 300 mm Test Wafer Specifications for 0.25 micron Technology | 30 Jun 1997 |
| 97063298A-XFR | I300I Guidelines on 300 mm Process Tool Mechanical Interfaces for Wafer Lot Delivery, Buffering, and Loading (Rev. D, 9/3/96) | 11 Jun 1997 |
| 97063295A-XFR | Metrology Tool Gauge Study Procedure for the International 300 mm Initiative (I300I) | 10 Jun 1997 |