450 mm Transition
As part of ISMI's portfolio of programs dedicated to improving productivity and reducing costs in today's and tomorrow's fabs, ISMI is building the infrastructure for the transition to 450 mm.
The ISMI 450 mm Program is committed to enabling a cost-effective transition through coordination and development of infrastructure, guidance, and industry readiness. Key components of the program include:
- 450 mm wafer availability to enable 450 mm equipment development
- An interoperability test bed that supports the creation of testable Factory Architecture guidelines and to accelerate the formation of 450 mm standards
- Creation of test wafers and definition of equipment performance metrics to enable 450 mm equipment development for demonstration
- Prototype testing of 450 mm Factory Integration Equipment
- Development of EHS guidelines with an emphasis on “Green Manufacturing”
- Proactive evaluation of 450 mm operational challenges
- Timely coordination of strategic industry activities and collaboration with key suppliers
450 mm Cost Sharing Program
ISMI is accepting submissions from process and metrology equipment suppliers for 450 mm tool transition projects to be considered for ISMI cost-sharing and other assistance. See details.
450 mm Guidelines
450 mm Equipment
- 450 mm Equipment Performance Metrics (PDF) - June 2009
- 450 mm Equipment Performance Metrics (PDF) - Feb. 2009
- 450 mm Equipment Performance Metrics (PDF) - Nov. 2008
- 450 mm Test Wafer Generation Equipment Requirements
450 mm Factory Integration
450 mm Environmental, Safety and Health
- 450 mm Equipment ESH Checklist
- Guideline for Environmental Characterization of Semiconductor Process Equipment
- SEMI S23 Application Guide and Total Equivalent Energy (TEE) Conversion Tool
- Combustible Materials Test Report
- Application Guide for Manual Material Handling Requirements in SEMI S8
Contact: Tom Jefferson - 450 mm Program Manager or Jackie Ferrell - Industry Standards and Collaboration