SEMATECH Dictionary of Semiconductor Terms, Rev 5.0 Online Version
Abstract
This dictionary defines terms used in the semiconductor industry. It is intended to provide a common SEMATECH language that improves communication within SEMATECH and throughout the SEMATECH community by providing and promoting a standard terminology. Some of the terms in this dictionary are specific to SEMATECH. This version (revision 5.0) also includes terminology from other industry organizations, namely ASME, SIA, EIA, IEEE, ASTM, and SEMI. Sources are indicated at the end of each definition.
Trademarks
SEMATECH and the SEMATECH logo are registered service marks of SEMATECH, Inc.
HEPA is a registered trademark of HEPA Corporation
Motif is a registered trademark of Open Software Foundation, Inc.
QUAD is a registered trademark of Lam Research Corporation.
SCALPEL is a trademark of AT&T.
TLV is a trademark of the American Conference of Governmental Industrial Hygienists.
VAX is a registered trademark of Digital Equipment Corporation.
WorkStream is a registered trademark of Consilium, Inc.
Reprint Permissions
ASTM definitions have been reprinted, with permission, from the Annual Book of ASTM Standards,
copyright American Society for Testing and Materials, 1916 Race Street, Philadelphia, PA,
19103-1187.
ASME definitions have been reprinted with permission from the American Society of Mechanical
Engineers, 345 East 47th Street, New York, NY, 10017-2392.
EIA definitions have been reprinted with permission from the Electronic Industries Association,
2500 Wilson Boulevard, Arlington, VA, 22201-2392.
IEEE definitions have been reprinted from IEEE Std 100-1992 IEEE Standard Dictionary of Electrical
and Electronics Terms, copyright 1993 by the Institute of Electrical and Electronics Engineers,
Inc. The IEEE disclaims any responsibility or liability resulting from the placement and use in
this publication. Information is reprinted with the permission of IEEE.
National Technology Roadmap for Semiconductors definitions are reprinted with permission from
Semiconductor Industry Association (SIA), 4300 Stevens Creek Boulevard, Suite 271, San Jose, CA,
95129.
SEMI definitions are reprinted by SEMATECH with permission from Semiconductor Equipment and
Materials International. Copyright Semiconductor Equipment and Materials International, 805 E.
Middlefield Road, Mountain View, CA, 94043.
Last updated August 1, 1996.