Acronyms and Abbreviations

S

S
sulfur

SA
surface area; subresolution assist; structured analysis; sensitivity analysis

S/A
sensor/actuator

SAA
static automated analysis

SAB
sensor/actuator bus

SACVD
sub-atmospheric chemical vapor deposition

SAD
selected area diffraction

SAE
Society of Automotive Engineers

SAF
stuck-at fault

SAM
scanning Auger microscopy; scanning acoustical microscopy; self-assembled monolayer

SANS
small angle neutron scattering

SAT
spray acid tool

SAW
surface acoustic wave

SAXS
X-ray scattering

Sb
antimony

SB
strong base ion exchange

SBl
safety bulletin

Sc
scandium

SC1
Standard Clean 1

SC2
Standard Clean 2

SCA
surface charge analysis

SCALE
SEMATECH Cell Application Learning Environment

SCALPEL
scattering with aperture limited projection lithography

SCBA
self-contained breathing apparatus

SCC
strategic cell controller

SCCDRM
single crystal critical dimension reference material

SCCS
source code control system

SCDS
super catalytic decomposition system

SCE
saturated calomel electrode; short channel effects

SCF
supercritical fluid

SCFH
standard cubic feet per hour

SCI
surface charge imaging

SCIC
semiconductor integrated circuit

SCM
scanning capacitance microscopy

SCOE
SEMATECH Center of Excellence

SCP
single chip package

SCR
silicon controlled rectifier

SD
small dual in-line package; structured design

S/D
source/drain

SDFL
Schottky-diode FET logic

SDLC
synchronous data link control

SDM
Specific Device Model

SDS
smart distributed system; safe delivery system

SDSI
synchronous data-link control

SCE
short channel effects

Se
selenium

SE
spectroscopic ellipsometry; secondary electron; scattered electron

SEAJ
Semiconductor Equipment Association of Japan

SEC
size exclusion chromatography

SECS
Semiconductor Equipment Communications Standard

SEG
selective epitaxial growth

SEIM
software engineering improvement method

SEM
scanning electron microscopy; specific equipment model

SEMI
Semiconductor Equipment and Materials International

SemiSPIN
Semiconductor Software Process Improvement Network

SEP
software engineering process; spin etch planarization

SEPG
Software Engineering Process Group

SER
soft error rate

SEQDB
Semiconductor Equipment Database

SETEC
Semiconductor Equipment Technology Center

SEVD
sphere equivalent volume diameter

SFC
supercritical fluid chromatography

SFCS
shop floor control system

SFCS I/F
shop floor control system interface

SFP
stress-free polishing

SGML
Standard Generalized Markup Language

SGMM
Semiconductor Generic Manufacturing Model

SGMRS
Semiconductor Generic Manufacturing Requirements Specification

SHI
spatial heterodyned interferometry

Si
silicon

SIA
Semiconductor Industry Association

SIDP
sputter ion depth profiling

SIL
Systems Integration Lab (was ATF)

SILC
stress-induced leakage current

SiLK
silicon low-k

SIM
selective ion marketing; selective ion monitoring

SIMO
single input, multi output

SIMOX
separation by implantation of oxygen

SIMS
secondary ion mass spectroscopy

SIP
SEMATECH Internal Program, self-ionizing plasma

SIRIJ
Semiconductor Industry Research Institute of Japan

SIS
self-ionized sputter

SISO
single input, single output

SIV
sensors in vacuum

SL
specification limit

SLAM
scanning laser acoustic microscopy; single layer alumina metallization

SLC
surface laminar circuit

SLDY
systematic limited yield

SLM
single-level metal

SLOC
source lines of code

SLSI
super large scale integration

Sm
samarium

SM
stress migration

SMB
single-mask bumping

SMC
surface-mounted components

SMD
surface-mounted device

SME
subject matter expert; software maintenance engineer; semiconductor manufacturing equipment

SMG
screen management guide

SMIF
standard mechanical interface

SMLY
systematic mechanisms limited yield

SMPM
SECS message protocol machine

SMR
semiconductor mask representation

SMS
SECS message service

SMT
surface mount technology

SMTS
Strategic Material Transport System

s/n
serial number

S/N
signal-to-noise

Sn
tin

SNL
Sandia National Laboratory

SNMS
sputtered neutral mass spectroscopy

SNOM
scanning nearfield optical microscopy

SNR
signal-to-noise ratio

SO
small outline (package)

SOC
system on a chip; silicon-on-chip

SoCoMo
source collector module

SOD
spin-on dielectric

SODAS
SEMATECH Organized Damage Analysis Software

SOG
spin-on glass

SOI
silicon on insulator

SOIC
small outline integrated circuit

SOM
scanning optical microscopy; sulfuric acid-ozone mixture

SON
small outline nonleaded package

SONOS
silicon/oxide/nitride/oxide/silicon

SOP
standard operating procedure

SOS
silicon on sapphire

SOW
statement of work

SPC
statistical process control

SPF
spectral purity filter

SPI
Software Process Improvement

SPICE
simulation program with integrated circuit emphasis

SPIDER
SEMATECH Process Induced Damage Effect Revealer

SPIDER-MEM
SPIDER-Manufacturing Equipment Monitor

SPIN
Software Process Improvement Network

SPM
scanning probe microscopy; sulfuric acid/hydrogen peroxide mixture

SPP
single-phase printing

SPR
semiconductor process representation

SPS
surface preparation system

SPT
shortest processing time

SPV
surface photovoltage

SQC
statistical quality control

SQL
Structured Query Language

SQPMM
Software Quality and Process Maturity Model

Sr
strontium

SRAC
Supplier Relations Action Council

SRAM
static random access memory

SRC
Semiconductor Research Corporation

SRM
standard reference material

SRP
spreading resistance probe

SRPT
shortest remaining processing time

SRS
software requirements specification

SSA
Semiconductor Safety Association; spatial signature analysis

SSC
subsystem controller

SSE
sum squared error

SSEM
Stepper Specific Equipment Model

SSI
small scale integration

SSM
strategic sourcing methodology

SSQA
Standardized Supplier Quality Assessment

SSRL
SEMATECH Software Reuse Library

SSRP
SEMATECH Software Reuse Program

STA
static timing analysis

STAR
simultaneous transmitted and reflected

STEL
short-term exposure limit

STEM
scanning transmission electron microscope/microscopy

STI
shallow trench isolation

STM
scanning tunneling microscopy

STP
standard temperature and pressure; system test plan

SU
subresolution attenuated

SUT
system under test

SVD
singular value decomposition

SVID
system variable identifier

SWAT
Software Action Team

SWC
solvent waste collection

SWEAT
standard wafer-level electromigration accelerated test

SWI
static walkthrough/inspection

SWIM
Semiconductor Workbench for Integrated Modeling

SWP
single wafer processing

SWR
semiconductor wafer representation

SWV
square wave voltammetry

SXR
specular X-ray reflectance or reflectometry