Acronyms and Abbreviations

P

P
phosphorous

Pa
protactinium; pascals

PAB
post-apply bake

PAC
photoactive compound

PACVD
plasma-assisted chemical vapor deposition

PA-FTIR
photoacoustic Fourier transform infrared spectroscopy

PAG
photoacid generator; program advisory group

PAL
process automation language; programmable array logic; process asset library

PALS
positron annihilation lifetime spectroscopy

PAM
process application module

PAS
photoacoustic spectroscopy; project assessment survey

PAT
Process Action Team

PAWS
portable acoustic wave sensor

Pb
lead

PBET
Performance-Based Equipment Training

PBGA
plastic ball grid array

PBL
poly-buffered LOCOS

PBN
plasma bridge neutralizer

PBS
photon backscattering

PBTI
positive bias temperature instability

PC
personal computer; programmable controller; process control; photoconductivity

PCA
principal component analysis

PCAD
packaging computer-aided design

PCB
printed circuit board

PCD
photochemical darkening

PCHP
pre-coat hotplate

PCM
pulse-code modulation; process control monitor

PCO
photocatalytic oxidation

PCOMP
pressure compensation

PCMP
post chemical-mechanical polishing

PCMS
plasma chemistry Monte-Carlo simulation

PCR
principle component regression; probe card repair

PCS
production cost savings

PCSA
polarizer-compensator sample analyzer

PCT
Process Change Teams

PCW
process cooling water

PCWR
process cooling water returns

Pd
palladium

PDA
personal digital assistant; post-deposition anneal

PDC
passive data collection

PDF
portable document format; process design failure

PDL
Plastics Design Library

PDS
photothermal displacement spectroscopy

PDSA
peroxydisulfuric acid

PDU
protocol data unit

PDVC
phase-dependent voltage contrast

P/E
program/erase

PEB
post-exposure bake

PEC
proximity effect correction; protective electrostatic chuck cover

PECVD
plasma-enhanced chemical vapor deposition

PED
post-exposure delay

PEDS
plasma-enhanced deposition system

PEEK
polyetheretherkeytone

PEELS
parallel electron energy loss spectrometry

PEEM
photo-electron emission microscope

PEF
plasma-enhanced floodgun

PEL
permissible exposure level (limit)

PERT
program evaluation review technique

PES
photoelectron spectroscopy

PET
post-etch treatment

PETEOS
plasma-enhanced tetraethylosilicate

PFA
perfluoroalkoxy

PFC
perfluorocompound; perfluorocarbon

PFPE
perfluorinated polyether

PFR
plug-flow reactor

PFOS
perfluorooctane sulfonate

PFS
plasma flood system

PfTQ
Partnering for Total Quality

PGA
pin grid array

PGI
purge gas inlet

P-GILD
projection gas immersion laser doping

PGV
person guided vehicle

PHI
Physical Electronics Co.

PI
proportional integral

PIC
Physical interfaces and carriers

PID
proportional integral derivative; process-induced defect

PIII
plasma immersion ion implantation

PIND
particle impact noise detection

PIP
process-induced particles

PIV
peak inverse voltage; post indicator valve

PIXE
photon-induced X-ray emission

PLA
programmable logic array

PLC
programmable logic controller; product life cycle

PLCC
plastic leaded chip carrier

PLDD
p-type lightly doped drain

PLIS
precision liquid injection system

PLL
plasma lockload; phase-locked loop

PLS
partial least squares; projection of latent structures

PLY
photolimited yield

Pm
promethium

PM
particle monitor; preventive maintenance; process module

PMA
post-metal anneal

PMC
process module controller

PMCC
Pensky-Martens closed cup

PMI
phase measuring interferometer

PMM
phase measuring microscope

PMMA
polymethyl methacrylate

PMOS
positive channel metal-oxide semiconductor

PMS
particle measuring system

PMT
photomultiplier tube

PMTF
Product Management Task Force

PNL
pulsed nucleation layer

PNNL
Pacific Northwest National Laboratories (Battelle)

PNWD
Pacific Northwest Division (Battelle, Pacific Northwest National Laboratories)

Po
polonium

PO
projection optics

POB
projection optics box

POCP
photochemical ozone creation potential

POR
process of record

POSIX
portable operating system interface for computing environments

POU
point-of-use

POUCG
point-of-use chemical generation

PP
polypropylene

PPE
personal protective equipment

PPGA
plastic pin grid array

PPID
process program identification

PPM
point projection microscope

PPPL
Princeton Plasma Physics Laboratory

PPRef
process program reference

PQFP
plastic quad flat pack

PRAS
particle reactor analysis services

Pr
praseodymium

PRAT
production reliability acceptance test

PRB
pseudo-random binary

PRBS
pseudo-random binary sequences

PRESS
prediction error sum of squares

PROM
programmable read-only memory

PRSC
parametric response surface control

PRV
person rail guided vehicle

PS
porous silicon

PSAM
probabilistic shape and appearance model

PSB
phase shifting blank; product safety bulletin

PSC
porous silicon capacitor

PSD
power spectral density; port status display

PSDA
pressure decay sorption apparatus

PSDI
phase-shifting diffraction interferometer

PSG
phosphosilicate glass; phosphorus doped silicon glass

PSE
pre-sputter etch

PSII
plasma source ion implantation

PSL
polystyrene latex

PSLS
polystyrene latex sphere

PSM
phase shifting mask; phase shift mask

PSR
perfectly stirred reactor

Pt
platinum

P/T
precision-tolerance

PTAB
Project Technical Advisory Board

PTC
pre- and post-process treatment chambers

PTFE
polytetrafluorethylene; Teflon

Pu
plutonium

PV
process vacuum

PVA
polyvinylacetate

PVC
polyvinylchloride

PVD
physical vapor deposition

PVDF
polyvinylidene fluoride

PWB
printed wiring board

PWP
particles per wafer pass