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I
iodine
I2L
integrated injector logic
I300I
International 300 mm Initiative
IA
instrument air
iALD
ionized atomic layer deposition
IBF
ion beam figure
IC
integrated circuit; ion chromatography
ICAP
inductively-coupled argon-plasma spectrometry
ICCG
incomplete conjugate gradient
ICMS
integrated circuit measurement system
ICP
inductively-coupled plasma
ICP-AES
inductively-coupled plasma atomic emission spectroscopy
ICP-MS
inductively-coupled plasma mass spectrometry
ICT
ideal cycle time
ICW
industrial city water
Id
drain current
IDA
intentional defect array
IDEAL
initiating, diagnosing, establishing, acting, leveraging
IDDQ
direct drain quiescent current
IDL
interface definition language; implant data log
IDLH
immediately dangerous to life or health
IDM
integrated device manufacturer
IDS
interactive diagnostic system
Idsat
saturation current
IEA
ion energy analysis
IEC
infused emitter coupling
IEDF
ion energy distribution function
IEEE
Institute of Electrical and Electronics Engineers
IEP
interferometric endpoint
IERN
internal-external recurrent neural network
IF
interface; intermediate focus
IFS
iterated function system
IG
intrinsic gettering
IGFET
insulated-gate field-effect transistor
IHT
ideal handler time
II
ion implant (also I2)
IIAP
IMEC Industrial Affiliation Programs
ILB
inner lead bond
ILD
interlevel dielectric; interlayer dielectric
ILDS
integrated liquid delivery system
ILS
intracavity laser spectroscopy
IM
integrated model; integrated metrology
IMD
intermetal dielectric
IMEC
Interuniversity MicroElectronics Center
IMMA
ion microphobe mass analysis |
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IMP
ion metal plasma
IMR
integrated model repository
IMS
ion mobility spectroscopy
In
indium
INCAMS
individual cassette manufacturing system
I/O
input/output
IOC
input/output controller
IP
image placement; Internet protocol
IPA
isopropyl alcohol
IPD
in-plane distortion
IPE
internal photoemission
IPL
ion projection lithography
IPO
initial public offering
IPP
inplane distortion
IPS
inductive plasma source
IPT
ideal process time
Ir
iridium
IR
infrared
IRAS
infrared reflection-absorption spectroscopy
IRIS
imaging of radicals interacting with surfaces
IRLAS
infrared laser absorption spectroscopy
IRN
internal recurrent neural network
IR-OBIRCH
infrared optical beam-induced resistance charge
IRONMAN
Improving Reliability of New Machines at Night
IRTC-1
interconnect reliability test chip-1
IS
information systems; interface specifications; integrated
systems
ISA
Instrumentation Society of America
ISC
Industry Steering Council
ISDN
integrated services digital network
ISEM
inspection/review specific equipment model
ISM
inductor super magnetron
ISMI
International SEMATECH Manufacturing Initiative
ISPM
in situ particle monitor
ISR
in situ rinse
ISS
ion scattering spectroscopy
ISSG
in situ steam generation
ITRI
Interconnection Technology Research Institute
ITRS
International Technology Roadmap for Semiconductors
IV
current voltage
IVH
interstitial via hole
IVP
integrated vacuum processing
IWN
industrial waste neutralization
IYM
integrated yeild management |
