Acronyms and Abbreviations

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C

   

C
carbon

C-to-C
cassette-to-cassette

Ca
calcium

CA
CIM architecture, clear aperture

CAA
CIM applications architecture

CAB
Competitive Analysis Benchmarking

CAD
computer-aided design

CADT
control application development tool

CAE
computer-aided engineering

CAF
controlled ambient facility

CAG
Competitive Analysis Group

CAI
computer-assisted instruction

CALS
Computer-Aided Logistics Support (Air Force program)

CAM
computer-aided manufacturing

CAP
Consumables Acceleration Program

CAPS
computer-assisted problem solving

CAR
computer-aided research

CARC
critical aspect ratio collapse

CARL
chemically amplified resist lithography

CARRI
Computerized Assessment of Relative Risk Impacts

CAS
Chemical Abstract Service

CASE
computer-aided software engineering; computer-aided systems engineering

CAT
computer-aided testing; cassette alignment tool

CAW
Construction Analysis Workgroup

CAWC
cryogenic aerosol wafer cleaning

Cb
columbiun

CBD
correct-by-design

CBGA
ceramic ball grid array

CBIR
content-based image retrieval

CBS
chemical bottle storage area

CBT
computer-based training

CC
chip carrier; cluster controller

CCC
ceramic chip carrier

CCD
charge-coupled device

CCOS
computer-controlled optical surfacing

CCSL
compatible current-sinking logic

CCW
counterclockwise

Cd
cadmium

CD
critical dimension

CDA
clean dry air

CDC
Chemical Data Council

CDE
chemical downstream etch

CDEM
Customer Delivery Enterprise Model

CDF
cumulative distribution function

CDG
ceramic diaphragm gauge

CDI
collector-diffusion isolation

CDM
Common Device Model; charge device model

CDO
controlled decomposition/oxidation

CD/OL
critical dimension overlay

CDR
chemical distribution room

CD-ROM
compact disk read-only memory

CDU
chemical dispense unit

Ce
cerium

CE
capillary electrophoresis; conversion efficiency

CEC
cell evaluation chip

CEE
control execution environment

CEID
collection event identifier

CEM
continuous emissions monitoring

CEN
change engineering notice

CEPT
COMETS Equipment Performance Tracking

CER-DIP
ceramic dual in-line package

CET
capacitance equivalent thickness

Cf
californium

CFA
component failure analysis

CFC
chlorofluorocarbon

CFD
computational fluid dynamics

CFE
cold field emission

CFI
CAD Framework Initiative

CFM
contamination-free manufacturing

CFMRC
Contamination-Free Manufacturing Research Center

CFT
cross-functional team

CGA
Compressed Gas Association

CHP
coat hotplate

CHR
communication history report

CI
carrier illumination; confidence interval

CIC
cleanroom interface chamber

CID
charge-injection device

CIE
computer-integrated engineering

CIM
computer-integrated manufacturing

CIM-OSA
computer-integrated manufacturing-open systems architecture (ESPRIT program)

CIP
Continuous Improvement Program

CIS
Center for Integrated Systems

CISC
complex instruction set computer

 

Cl
chlorine

CL
cathodo-luminescent

CLC
cancel lot cycle

CLCC
ceramic leaded chip carrier

CLIC
closed-loop intensity control

CLY
circuit-limited yield

Cm
curium

CM
configuration management; cassette module

CMA
cylindrical mirror analyzer

CMC
cassette module controller

CML
current mode logic

CMM
capability maturity model; coordinate measuring machine

CMOS
complementary metal-oxide semiconductor

CMP
chemical mechanical planarization; chemical mechanical polishing

CMR
common-mode rejection ratio; cancel move request

CMS
coordinate measuring system

CMUG
Cost Modeling Users Group

CNC
computer numerical control; condensation nucleus counter

CNS
central nervous system

CNT
carbon nanotube

Co
cobalt

COB
chip-on-board

COC
cost of consumables

CODEC
coder-decoder

COED
computer optimized experimental design

COGS
cost of goods sold

COO
cost of ownership

COOL
Cost of Ownership Luminator (Wright, Williams & Kelly)

COPS
crystal oriented pits

CORBA
common object request broker architecture

CORE
composite object reference

COSS
common object services specification

COT
customer-owned tooling

CoV
coefficient of variance

Cp
process capability

CP
chip place

CPA
commerical product adhesive

CPD
concurrent product development

CPE
Communications, Participation, and Education program

CPGA
ceramic pin grid array

Cpk
process capability index

CP/M
computer program/maintenance

CPM
chamber pressure management

CPU
central processing unit

CQFP
ceramic quad flat pack

CQN
closed-queuing network

Cr
chromium

CR
collisional radiative

CRADA
Cooperative Research and Development Agreement

CRC
cyclic redundancy check

CRM
Cost/Resource Model

CRT
cathode ray tube

Cs
cesium

CSA
CIM systems architecture

CSE
control systems engineering

CSF
critical success factor

CSL
current-steering logic

CSMA/CD
carrier-sense, multiple-access/collision detection

CSP
chip scale package

CSPED
concurrent semiconductor production and equipment development

CST
CIM systems technology

CSTR
continuously stirred tank reactor

CSV
comma-separated variable

CT
cycle time

CTC
cluster tool controller

CTE
coefficient of thermal expansion

CTF
contrast transfer function

CTI
computer-telephone integration; cycle time improvement

CTL
complementary transistor logic

CTMC
cluster tool modular communications

Cu
copper

CUB
central utility building

CUBES
capacity utilization bottleneck efficiency system

CUI
common user interface

CUSUM
cumulative sum

CV
capacitance voltage

CVC
chemical vapor cleaning

CVCM
collected volatile condensable materials

CVD
chemical vapor deposition

CVS
cyclic voltammetry stripping; constant voltage stress

CW
continuous wave; clockwise

CWS
chilled water system

CYM
cycle model

Cz
Czochralski process



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