Acronyms and Abbreviations

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B

   

B
billion; boron

Ba
barium

BACT
best available control technology

BARC
backside antireflective coating

BASE
Boston Area Semiconductor Education (Council)

BAW
bulk acoustic wave

BC
bias contrast

BCAD
business computer-aided manufacturing

BCB
benzocyclobutene

BCD
binary coded decimal; bulk chemical distribution

BDEV
behavior-level deviation

BDP
bilateral datum plane

BDS
Brownian Dynamics Simulation; beam delivery system

Be
beryllium

BENU
bull's eye nonuniformity

BEOL
back end-of-line

BES
backscatter electron signal

BESOI
bonded and etchedback SOI

BF
brightfield I

BFGS
Broyden-Fletcher-Goldfarb-Shanno optimization algorithm

BFL
buffered field-effect-transistor logic

BGA
ball grid array

BGS
bulk gas system

BHT
Brinell hardness test

BI
burn in

Bi
bismuth

BiCMOS
bipolar complementary metal-oxide semiconductor

BIFET
bipolar field-effect transistor

BIM
binary intensity mask

BiMOS
bipolar metal-oxide semiconductor

 

 

BIST
built-in self test

BIT
bulk ion temperature

BITE
built-in test equipment

Bk
berkelium

BKM
best known methods

BLD
beam lead device

BLEVE
boiling liquid expanding vapor explosion

BLOK
barrier low-k

BMC
bubble memory controller

BMD
bulk micro defect

BOE
buffered oxide etchant

BOR
bottom of range

BOSS
Book of SEMI Standards; binary object storage system; burn-out of sacrificial substances

BOX
buried oxide

BPE
beam profile ellipsometry

BPR
beam profile reflectometry; business process re-engineering

BPSG
boro phosphosilicate

BPTEOS
borophosphosilicate glass from a TEOS oxysilane source (TEOS is a trademark of NALCO Chemical Company)

Br
bromine

BSA
Beta Site Agreement

BSED
backscattered electron detection or detector

BSR
backside rinse

BT
bismallimide triazene

BTAB
bumped tape automated bonding

BTI
bias temperature instability

BTS
biased thermal stress

BV
breakdown voltage

BVH
buried via hole

BW
bandwidth



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