AA
atomic absorption
AAS
atomic absorption spectroscopy
AAS/GFAAS
atomic absorption spectroscopy/graphite furnace atomic absorption spectroscopy
ABC
activity-based costing; auto-adjustment of image brightness and contrast
ABM
activity-based management
ABS
antilock braking system
ABT
abrasive technology
ABW
apparent beam width
Ac
actinium
AC
alternating current; activated carbon
ACCESS
analysis computer for component engineering services support
ACF
anisotropic conductive film
ACGHIC
American Conference of Governmental Industrial Hygienists
ACI
after clean inspection
ACLV
across-chip linewidth variation
ACP
anisotropic conductive paste
ACR
absolute cryogenic radiometer
ACT
alternative control techniques; actual cycle time
A/D
analog to digital
ADC
analog-to-digital converter; automated data collection; automatic defect classification
ADE
advanced development environment
AID
after develop inspection
ADIG
Application Development Interface Guidelines
ADIO
analog/digital input/output
ADL
add lot
ADP
administrative data processing
ADT
applied diagnostic techniques
ADTSEM
Apply/Develop Track Specific Equipment Model
AE
atomic emission; acoustic emission; absolute ellipsometry; advanced energy
AEC
Advanced Equipment Controller
AECS
Advanced Equipment Control System; Automated Equipment Control System
AEI
after etch inspection; automated equipment interface
AEM
analytical electron microscopy
AES
Auger emission spectroscopy; Auger electron spectroscopy
AEX
acid exhaust AFD
application framework definition
AFM
atomic force microscopy
AFP
abrasive-free polish
Ag
silver
A-GEMTF
Advanced GEM Task Force
AGV
automated guided vehicle
AHF
anhydrous hydrogen fluoride
AHU
air handling unit
AI
artificial intelligence
AIChE
American Institute of Chemical Engineers
AIMS
aerial image microscope; aerial image measurement system; aerial image
monitoring system
AIR
automated image retrieval
AIT
aerial image tool
Al
aluminum
AlF
aluminum fluoride
ALCVD
atomic layer chemical vapor deposition
ALD
atomic layer deposition
ALE
atomic layer epitaxy; application logic element
ALID
alarm event identifier
ALS
Advanced Light Source (LBNL); advanced low-power Schottky
Alt
alternating
altPSM
alternating phase shift mask
ALU
arithmetic logic unit
Am
americium
AMC
airborne molecular contamination
AMH
automated material handling
AMHS
automated material handling system AML
automatic model linking
AMRC
Advanced Materials Research Center
AMT
advanced manufacturing technology AMU
atomic mass unit ANN
artificial neural network |
 |
ANOVA
analysis of variance
ANS
advanced nanodefect surface inspection system
ANSI
American National Standards Institute
AOM
acousto-optic modulators
AOQL
average outgoing quality level
AOV
air-operated valve
AP
adhesion promoter
APA
advanced performance algorithm
APC
advanced process control
APCD
add-on pollution control devices
APCFI
Advanced Process Control Framework Initiative
APCVD
atmospheric pressure chemical vapor deposition
APD
adhesion promoter dispense
APEC
advanced process equipment control
API
application programming interface; atmospheric pressure ionization
APIMS
atmospheric pressure ionization mass spectroscopy
APM
atmospheric passivation module; acoustic plate mode; ammonium hydroxide/hydrogen peroxide mixture
APRDL
Advanced Products Research and Development Laboratory
aPSM or APSM
attenuating phase shift mask
APT
advanced probe technology
AQ
administrative quality
AQI
ACCESS query interface
AQL
acceptance quality level: acceptable quality level
AQTX
aquatic toxicity
Ar
argon
AR
aspect ratio, antireflective
ARAMS
Automated Reliability, Availability, and Maintainability Standard
ARC
antireflective coating
ARDE
aspect ratio-dependent etching
ArF
exposure wavelength
ARIMA
auto regressive moving average with integration
ARO
after reciept of order
ARPA
Advanced Research Projects Agency (see DARPA)
ARS
angle-resolved scattering
As
arsenic
ASAP
Advanced Stepper Application Program; as soon as possible
ASHRAE
American Society of Heating Refrigeration and Airconditioning Engineers
ASIC
application-specific integrated circuit
ASO
automatic shutoff
ASP
advanced strip and passivation; advanced strip processor
ASR
automated send receive
AS/RS
automated storage and retrieval system
ASME
American Society for Mechanical Engineering
ASTM
American Society for Testing and Materials
ASV
advanced safety vehicle
At
astatine
ATDF
Advanced Tool Development Facility
ATE
automatic test equipment
ATF
Automation Test Facility (recently renamed SIL)
ATG
automatic test generation
ATLAS
abbreviated test language for all systems
atm
atmosphere
ATP
advanced technology program; adenosine triphosphate; acceptance and tool performance
ATR
attenuated total reflectance
Att
attenuated
ATR-FTIR
attenuated total reflectance Fourier transform infrared spectroscopy
Au
gold
AVP
advanced vertical processor
AVS
advanced visualization system
AWE
asymptotic waveform evaluation
AWISPM
above-wafer in situ particle monitoring
AWS
advanced wet station |
