Wafer Flatness Inspection Cost Model
The Wafer Flatness Inspection Cost Model provides a method for determining whether it is cost effective to require silicon wafer suppliers to perform 100% inspection for site flatness. The theoretical basis for this determination is described, and a spreadsheet is provided to do the calculations.
Format
The Wafer Flatness Inspection Cost Model is a self-extracting ZIP file; MS Word and Excel are required.
To download, user must agree to adhere to SEMATECH's Software License Agreement.