ISMI S23 Total Equivalent Energy (TEE) Calculator

Conservation of natural resources is of ever-increasing importance due to unpredictable resource costs, regulatory drivers, and customer and community pressures. A collaborative approach between device manufacturers and equipment suppliers to reducing the resources required to operate manufacturing equipment and facilities is required in order to control infrastructure and operating costs, and ultimately improve overall industry performance.

To facilitate this approach, ISMI has developed the ISMI S23 Total Equivalent Energy TEE Calculator II (TEECalc II), which provides a consistent method to convert a wide range of semiconductor manufacturing equipment utility consumption rates into equivalent annual energy usage.

The data gathered and calculations made are based on the SEMI S23 Energy Efficiency and Road-mapping Guidelines, and can be used to report and analyze process equipment energy and utility use at multiple levels.

  • IC manufacturers can use this information to identify areas to make improvements to existing tools and processes in order to conserve energy, resources and materials.
  • Equipment manufacturers benefit by having actual customer utility usage data to aid in the design and component selection decisions.

How the TEE Calculator works

The TEECalc II is a custom web application which identifies the total equipment energy performance for a tool based on the utility consumption rates for the tool's components or subsystems (such as a vacuum pump, power supply, or chamber and its associated support) multiplied by energy conversion factors (or ECFs) defined by S23. These components or subsystems can be combined into multiple tool profiles, eliminating the need to build a new profile for each tool from scratch. User data sets are securely stored and encrypted on a remote server securely connected through an https secure socket. Results can be saved locally as a PDF file or can be exported to an Excel worksheet.

How to obtain the ISMI S23 TEECalc II

Equipment suppliers and end users may download and use the application at no charge (see instructions at right).

Contacts

Lorn Christal
ISMI Project Manager
lorn.christal@ismi.sematech.org
512.356.3718

James Beasley
ISMI ESH Technology Center
james.beasley@ismi.sematech.org
512.356.7577