ISMI SEMI S23 Total Equivalent Energy (TEE) Reporting Tool
The ISMI S23 TEE tool is a custom user interface for entering and displaying data using a Microsoft Excel workbook. The user interacts with the custom interface only; the pages of the workbook remain in the background to store and manipulate the data, and many of the data pages are hidden from view. The data gathered and calculations made are based on the SEMI S23 energy efficiency and road mapping guideline.
The S23 TEE tool converts various semiconductor manufacturing equipment utility consumption rates into equivalent annual electrical energy usage (i.e., kilowatt hours per year) by multiplying specific utility consumption rates - m3/hour, liter/minute, etc - by S23-defined per utility conversion factors (energy conversion factors or ECFs).
The user enters utility consumption rates for components or subsystems of the tool, e.g., a vacuum pump, power supply, or chamber and its associated support chassis on a cluster tool; then the software automatically sums the data under a single, user defined manufacturing tool name. The components or subsystems can be combined into multiple tools, eliminating the need to build each tool's data from scratch. User data sets are stored in the S23 TEE tool Excel file. Each file can store the data for many component and tool configurations. The data can also be exported into an Excel worksheet.
Download ISMI SEMI S23 Total Equivalent Energy (TEE) Reporting Tool
To download and/or use, user must agree to adhere to ISMI's Software License Agreement.