ISMI Common GEM 300 Metadata
Equipment Data Acquisition (EDA), also referred to as Interface AEDA (Interface A) is made up of SEMI standards SEMI E125, E134, E120, E132, and supporting standards., provides the semiconductor industry with an important improvement in data collection. Among its most valuable features is the ability to provide descriptions of the equipment's structure and behavior to the factory. These metadata sets include the equipment components, the events and exceptions that can be reported, and all the available data parameters.
Consistent and high-quality definitions for the metadata are imperative. When the interface definition is more predictable and error-free, more of the client-side can be made common across the equipment set or automatically configured, reducing custom integration time and expense.
For that reason, ISMI is providing a collection of Common GEM 300 Metadata. Much of the metadata content is determined by related SEMI communication standards. For 300 mm manufacturing, the determining set of standards is referred to as the GEM 300 standards.
Why is the Common GEM 300 Metadata important?
The Common GEM 300 Metadata presents a significant opportunity to EDA developers and practitioners. It eliminates the detailed standards analysis required to design a conformant representation and provides over 6000 lines of XML code that would otherwise need to be created.
The GEM 300 standards define equipment behavior and context data common to all production equipment. This set of EDA 1105 conformant XML metadata files covers the GEM 300 standards in their various versions from 2003 to 2009.
The SEMI standards implemented in the Common GEM 300 Metadata set include:
- SEMI E30 - Generic Equipment Model (GEM)
- SEMI E40 - Process Job Management
- SEMI E87 - Carrier Management
- SEMI E90 - Substrate Tracking
- SEMI E94 - Control Job Management
- SEMI E116 - Equipment Performance Tracking
- SEMI E157 - Module Process Tracking
Who benefits from the Common GEM 300 Metadata?
As a common solution vetted by ISMI members, the Common GEM 300 Metadata should meet the needs of most device makers, eliminating a quantity of change requests and customization costs.
The Common GEM 300 Metadata will also benefit equipment suppliers by saving the time and effort needed to create an accurate metadata representation of the GEM 300 standards, and helps to ensure a high level of quality and completeness of the equipment metadata.
EDA practitioners can use the metadata directly in their implementation or as a guide for generating the metadata. In either case, using this metadata collection will eliminate decision making about what to include or eliminate, how to complete various fields, and how to interpret the EDA standards for the proper way to construct such items as StateMachines and SEMI Objects.
How to obtain the Common GEM 300 Metadata
EDA developers may download and use the metadata definitions at no charge (see instructions at right).
Contacts
Harvey Wohlwend
Project Manager
512-356-7536
Lance Rist
Technical Lead
512-356-3153