2010 ISMI Installed-base Equipment Series
The 2010 ISMI Installed-base Equipment Series is an equipment productivity forum for integrated circuit (IC) manufacturers and original equipment manufacturers (OEMs) to discuss key productivity and cost issues in a series of workshops focused on specific wafer fabrication equipment types. In addition, selected experts will be invited to present their unique perspectives on topics related to the various tool types.
IC manufacturers are invited to participate in these workshops to learn about solutions through the sharing of real fab experiences, including best-known-methods which can provide immediate valuable impact on their fabs.
Participants will be able to present and receive feedback on top equipment issues and benchmark equipment performance metrics, and will be able to discuss 'real life' maintenance, equipment engineering and parts challenges.
Attendance for these workshops is restricted to IC manufacturers and invited OEMs. Export restrictions and confidentiality requirements may apply.
Schedule of events
- Thermal Equipment Workshop - 23 March 2010; Austin, TX
This workshop provides a forum to discuss furnace, rapid thermal processing, and epitaxy equipment.
- Implant Equipment Workshop - 20-21 April 2010; Boston, MA
This workshop provides a forum to discuss installed-base implant equipment performance and challenges. - CVD Equipment Workshop - 22-24 June 2010; Milpitas, CA
This workshop provides a forum to discuss key productivity and cost issues associated with single wafer processing chemical vapor deposition (CVD) equipment. - Etch Equipment Workshop - 13-15 July; San Francisco, CA
This workshop provides a forum to discuss key productivity and cost issues associated with etch and abatement technology. - Wet Processing Equipment Workshop - 28-30 September; Austin, TX
This workshop provides a forum to discuss key productivity and cost issues associated with wet processing equipment. - Metrology Equipment Workshop - 5-6 October; Albany, NY
- PVD Equipment Workshop - 12-14 October; San Jose, CA
- CMP Equipment Workshop - 16-18 November; San Jose, CA
Contact:
For additional information about these workshops and other ways to engage with ISMI, please contact Johannes Beekman.
