Mask Automation Workshop

09 February 2005

Agenda
Introduction Patricia Gabella
Mask Automation: Lessons Learned from the Wafer Fab Perspective E.Christenson and A. Haskins, AMD
Factory Automation Overview Brad Van Eck, ISMI
Automation Perspective Mask Factory
     IBM Mask House Tool Automation Strategy   Tom Faure, IBM
     DuPont Photomasks Automation Review Blaine Woodbury, DuPont Photomask
     Intel Mask Shop Automationl Andon Amoura, Intel
Lithography / Wafer Fab Requirements
     Freescale Mike Hamilton, Freescale
     Texas Instruments Bob Bennett, Texas Instruments
SEMI P-10 Update Wes Erck, SEMI
Economics of Photomask Manufacturing Professor Charles Weber