e-Diagnostics Working Group Meeting

29 June 2000

(All Presentations are in .PDF format)

• Agenda
• Supplier e-Diagnostics Comments (Applied Materials)
• International SEMATECH e-Manufacturing Working Group (IBM-Intel)
• In-Situ Fault Detection and Excursion Prevention for Wafer Processing Equipment (Lam)
• International SEMATECH e-Diagnostics (Novellus)
• Web Enabled Semiconductor Equipment Support: An Equipment Supplier's Perspective (TEL)
• VCS based e-Diagnostics (Varian)
• Member Company Caucus
• Data Elements - Working Group Draft
• Guidelines V0.4
• Creating Guidelines: I300I Lessons Learned
• Matrix
• e-Diagnostics Project
• Roadmap Composite
• Roadmap Discussion