Call for Papers
Deadline Extended: June 12, 2009
This call for papers is directed to the semiconductor community, although other relevant industries employing AEC/APC may also submit abstracts. The symposium will be built around sessions such as (but not limited to) the following topics:
- Factory-wide and enterprise-wide applications and deployment
- Sensor development, implementation and integration
- Sensor/actuator bus and intelligent sensors
- Integrated metrology and virtual metrology
- APC integration with yield management and DFM
- Real-time data collection and data management
- Control architecture requirements
- Merging APC with other capabilities such as real-time systems, yield, maintenance management and adaptive scheduling; merging of data associated with these applications
- Applications (Etch, Litho, CVD, PVD, Implant)
- Fault detection and classification (FDC); fault prediction (FP)
- Future APC needs and requirements
- Run-to-run, wafer-to-wafer, real-time control; process modeling and model-based control
- Benefits and justification (ROI, Coo, OEE)
- Standards (process control systems, sensorbus, data quality, integrated metrology, EDA, time synchronization)
- Tool productivity data collection/analysis
- E-diagnostics, E-manufacturing, and EEC
- APC in the next generation factory (NGF)
- APC and APC-related advancements in solar, LCD and memory devices industries
- APC applications to back-end semiconductor manufacturing
Abstract Submission Guidelines
- The abstract is limited to one page of text (maximum of 1,000 words) and one page for figures, if needed. Summarize your theme in as much detail as allowed by the word count limitation.
- You must submit your abstract in Microsoft Word format using the online submission form (below).
- Abstracts, presentations, papers, posters, and any other material presented at the AEC/APC Symposium must NOT contain CONFIDENTIAL or PROPRIETARY information. ISMI is solely responsible for acceptance or rejection of any submissions.
Abstract Submission Form
| Important Dates | |
|---|---|
| Abstract Submission Period | March 16‑June 30, 2009 |
| Notification of Acceptance | June 19, 2009 |
| Presentation Submission Period | June 19‑August 14, 2009 |
| Presentation Reformatting Deadline | September 1, 2009 |
Contact
Carolon Gerkin
AEC/APC Submissions Coordinator
512.356.3155
Or send an message to aecapc@ismi.sematech.org
Student Paper Competition
Submissions for the AEC/APC Symposium Student Paper Competition are also being accepted. Find out more.
