5th ISMI Symposium on Manufacturing Effectiveness
Equipment Chamber Matching Workshop
Monday & Tuesday, October 20-21
8AM-5PM
Facilitators: Masato Sadaoka, ISMI/Renesas and Nobuyuki Ikezawa, ISMI/NEC
This ISMI member-only workshop will focus on procedures to identify important and/or problematic parameters for matching issues, as well as guidelines of baseline references for ensuring equipment health.
Selected equipment suppliers will demonstrate their strategic plans and activities related to matching issue, and discuss potential collaborations with ISMI member companies to improve equipment reliability and productivity.
About the Moderators
Masato Sadaoka is a Renesas assignee who has been working for two years on ISMI's Equipment Chamber Matching (ECM) project. Additionally he is responsible for work on ISMI's Equipment Sequence and Transient variability project. His previous responsibility at Renesas is in 300mm process/equipment engineering.
Nobuyuki Ikezawa is a NEC assignee who has been working on ISMI's ECM project for one year. His previous background at NEC is in dry etch process and process integration engineering.
Who Should Attend
Attendance at this workshop is restricted to ISMI members only.
Process engineers, equipment engineers, industrial engineers, fab managers, manufacturing, operations and engineering managers are encouraged to attend.
How to Register
You must register to attend this workshop. ISMI members may register at no charge.
