| Abstract |
Reducing Fault Detection False Rate and Improving Productiivity Using Multivariate Analysis |
Larry Hendler, MKS |
| Abstract |
Multivariate Fault Detection Method for Non-Gaussian Distributed Implant Data |
John Mao, Intel |
| Abstract |
Automatic Fault Classification to Improve Advanced Fab Productivity |
Shuh-Chwen Yeh, TSMC |
| Abstract |
Simplified SPC Limits Selection |
Rick Patty, Spansion |
| Abstract |
Time Series Control Charts for Tool Data in Semiconductor Manufacturing |
Hyun Cheol Lee, Samsung |
| Abstract |
The Identification and Treatment of Outliers |
Kevin Anderson, Intel |
