| Abstract |
Design For Facilities |
Allan D. Chasey, Arizona State University |
| Abstract |
Rapid Tool Installation - A Process for all Concerned |
Kandi Collier, Intel |
| Abstract |
LEED, Follow, or Get Out of the Way - Sustainable Wafer Fab |
Paul Westbrook, Texas Instruments |
| Abstract |
Risk Abatement and Cost Reduction |
Don Yeaman, M + W Zander |
| Abstract |
Advanced Facility Design Drivers |
Michael O'Halloran, IDC |
| Abstract |
The Evaluation Of Nanoscale Motion Responses Using Advanced Structural Dynamics Concepts |
Ken Medearis, Kenneth Medearis and Associates |