| Abstract |
The Impact of New Process Control on Pattern Limited Yield: Enabling Technology Leaders to Become Low-Cost Producers |
Kevin Monahan, KLA Tencor |
| Abstract |
Demystifying Design-for-Yield |
Laura Peters, Semiconductor International Magazine |
| Abstract |
Establishing Competitive Semiconductor Manufacturing for 0.13um Copper Technology and Beyond |
John Allgair, Freescale (ISMI Assignee) |
| Abstract |
Tool-level Data Analysis for Increased Efficiency and Process Control |
Andrew Skumanich, Applied Materials |
| Abstract |
Systematic Mechanisms Limited Yield: Trends, Practices and Challenges |
Robert Leachman, University of California, Berkeley |
