| Abstract |
EPITS: A Supplier Perspective |
Phil Tarvin, Varian |
| Abstract |
2X Clean Process on 200mm TEOS/FTEOS Producer for Improved Throughput and less NF3 Consumption |
Christof Streck, AMD |
| Abstract |
A systematic approach to setup and execute Equipment Productivity Projects to Increase FAB performance on the example of a Strip Ash Tool |
Sandro Pampel, Infineon |
| Abstract |
Customized Equipment Performance Tracking & Analysis |
Thomas Hielscher, Infineon |
| Abstract |
Carrier Manager |
Nhan Anderson, Texas Instruments |
| Abstract |
Optimal Maintenance Headcount Allocation: The role of maintenance in the achievement of fast cycle time |
James Ignizio, Intel |
