EPIT Beta Site Program

Equipment Productivity Improvement Teams (EPITs) consist of equipment suppliers and ISMI member companies working together to address specific actions that improve equipment performance and cost of ownership.

EPIT beta sites are pre-release or early release hardware or software modifications, expected to provide a cost reduction, reliability enhancement, or throughput advantage to the evaluating member companies.

EPIT beta sites may be proposed by member companies, OEM suppliers, second tier suppliers, or the EPITeam. ISMI member companies volunteer for EPIT beta site evaluations and provide two evaluation reports to be shared with the supplier as well as other ISMI member companies.

EPIT Tool	Model Numbers/Platforms
AMAT DCVD	Centura, Producer: PECVD, SACVD, HDP-CVD 300mm Producer
AMAT Endura AMAT MCVD	Endura & Centura: PVD, IMP Ti & TiN, metal CVD (excluding Tungsten) Centura, Tungsten CVD only (DXZ Chamber) 300mm Endura, Endura 2
Novellus CVD	Concept 2 - Altus, Sequel, SPEED Concept 3, Vector
ASML	PAS 5500 Body stepper/scanner. Model /200, /300, /500, AT Platform, Twinscan
TEL Tracks	Mark7, Mark8, ACT8, ACT12, Tellius
Varian Implant	E500/E220 (mid current), Kestrel (high energy) VIISTA
AMAT Oxide CMP	Mirra Reflextion^TM