The ISMI GEM 300 Test Protocol

The ISMI GEM 300 Test Protocol was developed using a commercially available test product, CCS Envoy, to evaluate the equipment performance to requirements of SEMI® Standards. It consists of unit tests for each of the target standards, followed by operational scenario testing to evaluate how the standards work together. As base capabilities are validated in the unit tests, only two operational scenarios are required to sufficiently assess the ability of the standards implementations to work together in specific operation modes.

The ISMI GEM 300 Test Protocol includes test procedures and setup, test formats and templates for use with the Envoy tester software package, criteria and methodology for conducting conformance testing, report formats and guidelines, results analysis criteria and guidelines, results analysis tools and guidelines, and quality control criteria and guidelines.

The ISMI GEM 300 Test Protocol covers the basic functions defined in SEMI ® Standards and ISMI Operational Scenarios for a static operating mode (single FOUP/Carrier/batch, sequential processing). The test focuses primarily on material management, job execution, and the command and control relationship of the equipment to factory control systems.

Unit Tests

  • Evaluate requirements, options, and state models found in each standard
  • Evaluate the conformance of an implementation to the individual standard
  • Establish the basis for sample testing of the operational scenarios

Operational Scenario Tests

  • Evaluate how the standards implementations work together
  • Represent operational modes and equipment behavior requirements common to ISMI member companies
  • Requires a mix of fundamental, additional, optional, and operational requirements to be implemented

The ISMI operational scenarios go beyond typical industry tests by simulating 300 mm factory automated production and allowing an equipment maker to:

  • Establish that a tool meets a particular baseline capability
  • Eliminate some source inspections
  • Reduce field support
  • Distinguish common customer requirements from special customer needs

It is likely that a single IC maker may not require all of the functions tested in the ISMI GEM 300 Test Protocol, and may have additional requirements that would require additional testing.

The ISMI GEM 300 Test Protocol requires that testing be performed on a production-level tool with a fully released software version, as ISMI has determined that testing done on emulators and simulators does not adequately capture actual performance.

What are the Target Standards and Guidance Documents?

The standards requirements used in the ISMI GEM 300 Test Protocol are detailed in SEMI® Standards and ISMI guidance documents, including:

  • SEMI E30, Generic Model for Communications and Control of Manufacturing Equipment (GEM)
  • SEMI E37, High-Speed SECS Message Services (HSMS) Generic Services
  • SEMI E40, Standard for Processing Management
  • SEMI E84, Specification for Enhanced Carrier Handoff Parallel I/O Interface
  • SEMI E87, Provisional Specification for Carrier Management (CMS)
  • SEMI E90, Specification for Substrate Tracking
  • SEMI E94, Provisional Specification for Control Job Management
  • SEMI E109, Provisional Specification for Reticle and Pod Management (RPMS)
  • ISMI 300 mm Operational Flowcharts and Scenarios (Production Equipment): Version 10