Next Generation Factory |
| Document # | Document Name | Publication Date |
| 10105119A-TR |
ISMI Predictive Preventive Maintenance (PPM) Implementation Guideline |
10/22/2010 |
| 10105120A-TR |
ISMI Predictive Preventive Maintenance (PPM) Data Requirements |
10/22/2010 |
| 05074664C-ENG |
International SEMATECH Manufacturing Initiative (ISMI) Equipment Data Acquisition (EDA) Evaluation Method: Version 4.0 |
11/20/2009 |
| 06034748C-ENG |
Equipment Data Acquisition (EDA) Guidance |
05/07/2009 |
| 08094959A-TR |
Recipe and Parameter Management (RaP) Evaluation Method |
09/25/2008 |
| 08064934A-ENG |
ISMI Predictive and Preventive Maintenance Equipment Implementation Guidelines |
08/28/2008 |
| 07024843C-ENG |
Data Quality Guidelines: Version 1 |
07/24/2008 |
| 08074943A-ENG |
Data Quality Evaluation Methods |
07/24/2008 |
| 06094781B-ENG |
Factory and Equipment Clock Synchronization and Time-Stamping Guidelines: Version 2.0 |
06/27/2008 |
| 08054930A-TR |
Recipe Management System: Common Requirements and Benchmark 2007 |
05/09/2008 |
| 08054929A-TR |
Recipe and Parameter (RaP) Management Usage Scenarios |
05/07/2008 |
| 06114819C-ENG |
ISMI Consensus Preventive and Predictive Maintenance Vision Guideline: Version 1.1 |
11/20/2007 |
| 06104801A-ENG |
Recipe and Parameter Management (RaP) Supplier Guidance |
10/31/2006 |
| 06024736A-ENG |
Using Network Time Protocol (NTP): Introduction and Recommended Practices |
02/27/2006 |
| 04104579B-TR |
Equipment Data Acquisition (EDA) Usage Scenarios Rev. B |
05/04/2005 |
| 04094557A-ENG |
Semiconductor Factory and Equipment Clock Synchronization for e-Manufacturing |
09/30/2004 |
| 02064280A-ENG |
Data Quality Guidelines and Test Methods V. 0.6 |
07/31/2002 |
