Manufacturing Methods
Document # Document Name Publication Date
08094955A-ENG Non-Product Wafer (NPW) Tracking Guidelines 09/25/2008
08094959A-TR Recipe and Parameter Management (RaP) Evaluation Method 09/25/2008
08064934A-ENG ISMI Predictive and Preventive Maintenance Equipment Implementation Guidelines 08/28/2008
06034748B-ENG Equipment Data Acquisition (EDA) Metadata Guidance 07/31/2008
08074942A-ENG International SEMATECH Manufacturing Initiative (ISMI) Equipment Change Notification Method: Version 1 07/28/2008
07024843C-ENG Data Quality Guidelines: Version 1 07/24/2008
08074943A-ENG Data Quality Evaluation Methods 07/24/2008
06094781B-ENG Factory and Equipment Clock Synchronization and Time-Stamping Guidelines: Version 2.0 06/27/2008
08054930A-TR Recipe Management System: Common Requirements and Benchmark 2007 05/09/2008
08054929A-TR Recipe and Parameter (RaP) Management Usage Scenarios 05/07/2008
04114595D-ENG Unified Advanced Critical Dimension Scanning Electron Microscope (CD-SEM) Specification for sub-90 nm Technology (2007 Version) 01/15/2008
04114596D-ENG Unified Advanced Optical Critical Dimension (OCD) Scatterometry Specification for sub-65 nm Technology (2007 Version) 01/15/2008
07114888A-ENG Semiconductor Equipment Security Guidelines: Intellectual Property Protection 12/19/2007
06114819C-ENG ISMI Consensus Preventive and Predictive Maintenance Vision Guideline: Version 1.1 11/20/2007
06124825A-ENG Guideline for Environmental Characterization of Semiconductor Process Equipment 12/20/2006
06084775A-TR High Efficiency Particulate Air (HEPA) Filter Velocity Reduction Study 08/30/2006
06024736A-ENG Using Network Time Protocol (NTP): Introduction and Recommended Practices 02/27/2006
03044393H-ENG Semiconductor Equipment and Manufacturing Standards Activities Timeline and Roadmap, Rev. 09, December 2005 12/14/2005
01084153D-ENG e-Diagnostics Guidebook: Revision 2.1 07/12/2005
04104579B-TR Equipment Data Acquisition (EDA) Usage Scenarios Rev. B 05/04/2005
04094557A-ENG Semiconductor Factory and Equipment Clock Synchronization for e-Manufacturing 09/30/2004
03084426C-ENG Manufacturing Operation and Exception Scenarios for Reliable High Volume Manufacturing: Version 3.0 07/26/2004
04054532A-TR Assembly Analytical Forum Analytical Tool Roadmap White Paper 06/25/2004
04014488A-TR 300 mm Operational Flowcharts and Scenarios, V. 10 05/03/2004
04034510A-TR Comparing the Effectiveness of Stress-based Reliability Qualification Stress Conditions 04/12/2004
04024494A-TR Extreme Ultraviolet (EUV) Source Metrology for EUV Source Development 04/01/2004
04024492A-TR Understanding and Developing Knowledge-based Qualifications of Silicon Devices 03/30/2004
03084423A-TR Paragon Gas Injector Installation and Performance Report 12/12/2003
03044391A-ENG Equipment Lockout/Tagout (LOTO) Capability Improvement 04/24/2003
03034388A-ENG Automatic Data Collection (ADC) Requirements for Tracking Tool Performance 04/16/2003
03024374A-ENG Early Equipment Evaluation (E3) Methodology 02/28/2003
02054267A-ENG Wafer Probe Roadmap: Guidance for Wafer Probe R&D Resources - 2002 Edition 05/17/2002
00124063B-ENG 300 mm Best-Known Practices (300 BKP) for 300 mm Factory Integration 11/29/2001
01084148A-XFR Call for Improved Electromigration Simulation Tool 08/09/2001
01044107A-ENG International SEMATECH Equipment Maturity Assessment (EMA) Handbook 04/12/2001
00124038A-XFR Signature Failure Analysis-Based Methodology for Customer Failure Analysis 12/08/2000
00094004A-ENG Automatic Data Collection Baseline Requirements: Levels1 and 2 Events and Variables 10/25/2000
99113848B-ENG 300 mm Factory Layout and Material Handling Modeling: Phase II Report 06/28/2000
96063138C-ENG Radio Frequency (RF) Measurement and Control Project Report (TECQ001) 09/09/1998
98023456A-ENG The Effects of Ergonomic Stressors on Process Tool Maintenance and Utilization 03/31/1998
96103186A-TR Guidelines for Manufacturing Equipment Reference Manuals 10/31/1996
94112634C-ENG Capacity Utilization Bottleneck Efficiency System (CUBES): Release 2.5 02/29/1996
92061182B-GEN SEMATECH Qualification Plan Guidelines for Engineering 07/13/1995
95032745A-GEN Semiconductor Manufacturing Productivity Overall Equipment Effectiveness (OEE) Guidebook Revision 1.0 04/20/1995
94112638A-XFR Evaluating Automated Wafer Measurement Instruments 03/02/1995
93081755A-TR Alternative Models for Gauge Studies 02/24/1994