97023244A-ENG Abstract: Silent Discharge Plasma (SDP) for Point-of-Use (POU) Abatement of Volatile Organic Compound (VOC) Emissions: Final Report (ESHC003)

SEMATECH DOC ID #: 97023244A-ENG

Title: Silent Discharge Plasma (SDP) for Point-of-Use (POU) Abatement of Volatile Organic Compound (VOC) Emissions: Final Report (ESHC003)

Author(s): Avtar S. Jassal;John J. Coogan;

Document date: 02/26/1997

Descriptor(s): volatile organic compounds;emissions control;gas phase cleaning;beta site testing;point of use abatement;cost of ownership;reliability testing;plasma sources;

Abstract: Los Alamos National Laboratory (LANL) and SEMATECH have collaborated
to demonstrate a novel, potentially cost-effective, air emissions control
technology, applicable to point-of-use (POU) destruction of volatile organic
compounds (VOCs). This report documents the results from laboratory and pilot
tests to evaluate silent discharge plasma (SDP) for POU treatment as an
alternative to thermal treatment, catalytic, and carbon adsorption
technologies. The primary objective of this work was to determine the
reliability and cost of ownership (COO) of the SDP technology for potential
POU treatment of VOCs.

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