SEMATECH DOC ID #: 95042791A-ENG

Title: Benchscale Testing of Photocatalytic Oxidation (PCO) to Destroy Volatile Organic Compound (VOC) Emissions (S66)

Author(s): Craig Turchi;Roberto Rabago;

Document date: 04/27/1995

Descriptor(s): cleaning equipment;emissions control;volatile organic compounds;

Abstract:  This interim report addresses the results of testing photocatalytic oxidation
(PCO) (at the bench) of simulated organic air emissions from a parts cleaning
sink conducted as part of SEMATECH's S66 Air Emissions project. The simulated
effluent stream contained equal parts isopropanol, acetone, and methanol, at
a total concentration of 400 ppmv. Under the conditions examined, >95% of the
incoming pollutants were converted to carbon dioxide and water. Although high
conversion rates were achieved, initial scale-up calculations indicate that
process optimization is needed to achieve faster reaction rates.

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