SEMATECH DOC ID #: 94062405A-ENG

Title: Silane Safety Improvement Project S71 Final Report

Author(s): C. P. Lichtenwalner;John Mosovsky;Jorge Valdes;Terry Rogelstad;

Document date: 07/07/1994

Descriptor(s): chemicals;hazardous materials;silane;technology trends;point of use chemical generators;purification;risk assessment;

Abstract:  This report describes current engineering control practices used for handling
silane. Risks associated with using silane, based on actual silane safety
incident reports, are analyzed. Engineering controls and risk information was
gathered using survey questionnaires and site visits. Detailed survey data is
available as TT# 94062406A-XFR. Alternatives to silane in compressed gas
cylinders, including organosilanes, chlorosilanes, bulk distribution,
purification, and point-of-use chemical generation (POUCG) are evaluated.
Recommendations for future SEMATECH silane safety improvement efforts are
presented.

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