SEMATECH DOC ID #: 08074943A-ENG

Title: Data Quality Evaluation Methods

Author(s): Gino Crispieri;

Document date: 07/24/2008

Descriptor(s): data quality;data management standards;procedures;

Abstract:  This report from the MFGM031M project defines a method for
addressing potential equipment data quality issues. It includes
steps for both qualitative and quantitative evaluations of data
provided by manufacturing equipment. This methodology can be
applied by the original equipment manufacturer (OEM) and/or the
IC maker.

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