SEMATECH DOC ID #: 08064934A-ENG

Title: ISMI Predictive and Preventive Maintenance Equipment Implementation Guidelines

Author(s): Toysha Walker;

Document date: 08/28/2008

Descriptor(s): cost of ownership;data quality;equipment performance;equipment reliability;overall equipment effectiveness;preventive maintenance;reliability;

Abstract:  This report from the MFGM032M project introduces equipment
predictive/preventive maintenance (PPM) guidelines for the
semiconductor industry, in particular equipment suppliers and
equipment PPM implementers. It defines equipment data
requirements, equipment capability concepts, and factory
integration protocols to help equipment suppliers implement PPM.
Specific requirements for implementers are listed and explained
through use case scenarios and examples.

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