SEMATECH DOC ID #: 06094783B-ENG

Title: SEMI S23 Application Guide and Total Equivalent Energy (TEE) Conversion Tool: Selecting and Using Measurement Instruments to Conserve Resources

Author(s): Ralph M. Cohen;

Document date: 07/17/2007

Descriptor(s): energy use reduction;environmental standards;

Abstract:  This user's guide supplements SEMI S23-0705, Guide for
Conservation of Energy, Utilities, and Materials Used by
Semiconductor Manufacturing Equipment, by providing guidance in
the selection and use of utility measurement instruments and
recommendations for resource reduction. This revision includes
instructions for using the S23 Total Equivalent Energy (TEE)
conversion software tool. The TEE tool converts various
semiconductor manufacturing equipment utility consumption rates
into equivalent annual electrical energy usage. The data gathered
and calculations made are based on the SEMI S23 energy efficiency
and roadmapping guidelines.

The International SEMATECH Manufacturing Initiative, Inc. (ISMI)
is permitting your company to use this Supplier Application Guide
for Energy Measurement and Reporting for its own internal
business purposes. This guide is intended as an aid for energy
efficient design for semiconductor equipment. It is not intended
as a safety or purchasing guideline. Each semiconductor
manufacturer and supplier is free to propose and negotiate
whatever terms it wishes with any supplier.

ISMI FURNISHES THE GUIDE "AS-IS" AND WITHOUT ANY EXPRESSED
OR IMPLIED WARRANTY OF ANY KIND AND HEREBY EXPRESSLY
DISCLAIMS ANY IMPLIED WARRANTY OF MERCHANTABILITY OR
FITNESS FOR A PARTICULAR PURPOSE. ISMI WILL HAVE NO
LIABILITY WITH RESPECT TO ANY FAILURE OF THE GUIDE. ISMI
WILL NOT BE LIABLE FOR ANY LOSS OF PROFIT, LOSS OF USE,
INTERRUPTION OF BUSINESS OR DIRECT, INCIDENTAL,
CONSEQUENTIAL OR SPECIAL DAMAGES, FOR PERSONAL OR PROPERTY
INJURY ARISING FROM THE USE OF THIS GUIDE.

TEE Tool and License Agreement To Document

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