SEMATECH DOC ID #: 05084672B-ENG

Title: Equipment Automation Advanced Software Tester Product Description

Author(s): Charisse Rosier;Steve Fulton;

Document date: 09/20/2005

Descriptor(s): equipment testing;standards conformance;automation;equipment specifications;

Abstract:  This product description document (PDD) from the MFGM028M project
describes the usage environment and required capabilities of an
Advanced Software Tester (AST) to validate the conformance of the
integration and automation capabilities of semiconductor
manufacturing equipment primarily to SEMI standards and industry
guidelines. The principal audience for this document is software
suppliers who develop advanced equipment automation testers and
IC makers and equipment suppliers that are the target market for
such a product.

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