04104579B-TR Abstract: Equipment Data Acquisition (EDA) Usage Scenarios Rev. B

SEMATECH DOC ID #: 04104579B-TR

Title: Equipment Data Acquisition (EDA) Usage Scenarios Rev. B

Author(s): Gino Crispieri;

Document date: 05/04/2005

Descriptor(s): automated data collection;computer software;user interfaces;

Abstract: This report from the MFGM026M project provides basic usage
scenarios and common sequences of equipment data acquisition
(EDA) interface behavior based on SEMI E120, E132, E134, and
E125. The scenarios are a sample of usage scenarios for which the
EDA interface can potentially be applied. Some possible
unexpected cases that must be supported by the equipment and
third-party software supplier are also included. This revision
includes exception handling cases for the interface functions
defined in the EDA standards suite. These exceptions provide
further guidance on equipment behavior based on typical errors.
Exception handling for the client or host is not included since
only the expected behavior of the equipment is covered.

Exceptions cases are now part of this document for each of the
functions defined in EDA. Integrated scenarios with GEM/300
functionality are not covered.

To Document