SEMATECH DOC ID #: 04094557A-ENG
Title: Semiconductor Factory and Equipment Clock Synchronization for e-Manufacturing
Author(s): Brad Van Eck;Ya-Shian Li;
Document date: 09/30/2004
Descriptor(s): computer software;computer hardware;manufacturing management;standards;automated data collection;time synchronization;
Abstract:
This report from the Data Utilization project (MFGM027M)
describes the potential methods, challenges, and recommendations
for addressing factory and equipment clock synchronization and
time stamping and discusses why these are critical to the
industry as the upcoming generations of tools and fabrication
facilities are being built. It will also recommend areas for
standardization and best practices for clock synchronization and
time stamping.
Official contribution of the National Institute of Standards and
Technology; not subject to copyright in the United States.
Disclaimer: Any mention of commercial products within this
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