SEMATECH DOC ID #: 04024496A-TR

Title: Modeling Laser Heating of Condensed Xenon and Extreme Ultraviolet (EUV) Emissions

Author(s): Howard Milchberg;

Document date: 04/01/2004

Descriptor(s): xenon;lasers;high density plasmas;modeling;extreme ultraviolet lithography;

Abstract:  This report from the LITH152 project describes the development of
two models to describe laser target interactions with extreme
ultraviolet (EUV) sources. One is a 1D spherical near-field model
for laser-droplet sources; the other is an electromagnetic 1D
slab/film model for liquid filaments. Most effort was spent on
accelerating the code run time. The codes were also modified to
handle two-pulse heating.

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