04014488A-TR Abstract: 300 mm Operational Flowcharts and Scenarios, V. 10

SEMATECH DOC ID #: 04014488A-TR

Title: 300 mm Operational Flowcharts and Scenarios, V. 10

Author(s): Gino Crispieri;Lorn Christal;Steve Fulton;

Document date: 05/03/2004

Descriptor(s): automated materials handling;wafer transport;wafer carriers;standards;factory automation;

Abstract: This document contains a limited number of base operational
flowcharts and scenarios for moving material and processing
product within an end-user factory based on the communications
interface requirements specified by the I300I and J300 CIM Global
Joint Guidance for 300 mm Semiconductor Factories - Release Five,
April 2000. International SEMATECH (ISMT) developed these
flowcharts and scenarios under the direction of its member
companies. The flowcharts include initialization, material
movement, queue management, and product processing under a
variety of operational criteria. Version 10 updates the
flowcharts and scenarios to include changes to the SEMI standards
up to the 0304 cycle and to be consistent with current member
company implementation guidance.

Disclaimer: The standards, flowcharts and scenarios are subject to
change without notice.

International SEMATECH makes no representations or warranties, either
express or implied, as to merchantability, noninfringement or the
suitability of the flowcharts set forth herein for any use or particular
use in connection with any particular application. The user accepts the
documentation, materials, standards, flowcharts and scenarios "as-is" and
agrees that determination of suitability of the standards, flowcharts and
scenarios is solely the responsibility of the user.

International SEMATECH makes no representations or warranties
concerning the operation or performance of the flowcharts or the
accuracy or completeness of the documentation or materials
provided herewith, and, to the extent permitted by law, excludes
all implied warranties of merchantability or fitness for a
particular use. The user agrees that in no event shall
International SEMATECH be liable for lost profits, lost data,
lost goodwill nor for other damages in the nature of incidental,
consequential or exemplary damages, even if it has been advised
of the possibility of such damages, resulting from user's use or
inability to use the software, technical or editorial errors or
omissions contained herein or the furnishing, performance,
operation or use of the software, documentation or materials
provided herewith.

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