02064280A-ENG Abstract: Data Quality Guidelines and Test Methods V. 0.6

SEMATECH DOC ID #: 02064280A-ENG

Title: Data Quality Guidelines and Test Methods V. 0.6

Author(s): Gino Crispieri;John Pace;

Document date: 07/31/2002

Descriptor(s): automated data collection;test methods;data management standards;equipment performance;quality management;e-manufacturing;e-diagnostics;

Abstract: The data that manufacturing equipment generates is critical to
improving equipment productivity. This document from project
MFGM019 defines the characteristics and attributes of data
quality, the need to better establish the current state of
available data from processing tools today, and the conditions
that must be in place to ensure and measure data quality. This
document also describes the need to specify and develop test
methods associated with all equipment data used for control and
diagnostics. Test methods must be developed and enhanced for all
data used for control and monitoring generated by a tool through
SECS/GEM, an e-Diagnostic data port, and other defined interfaces
for e-Manufacturing. It is intended that this document be revised
and enhanced as more is learned about user's requirements for
data quality.

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