SEMATECH DOC ID #: 01104197A-XFR

Title: Guidelines for Environmental Characterization of Semiconductor Equipment

Author(s): Bill Reagan;David Green;Jerry Meyers;Peter Maroulis;

Document date: 12/04/2001

Descriptor(s): procedures;emissions control;design of experiments;flow rates;Fourier transform infrared spectroscopy;quadrupole mass spectroscopy;equipment characterization;

Abstract:  This document provides guidelines for suppliers of semiconductor
processing and abatement equipment to characterize their
equipment to meet environmental performance goals. The
characterization must include quantification of both air and
water emissions. Results must be presented in a final report that
includes measurements on both the centerline process recipe and
set of design of experiments (DOE) involving the key parameters
for that particular process. Forms for recording characterization
results and recommended measurement protocols are included.

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