SEMATECH DOC ID #: 01064132A-ENG

Title: Overhead Wafer Carrier Transport System Test Methodology

Author(s): Lorn Christal;

Document date: 06/29/2001

Descriptor(s): marathon runs;passive data collection;wafer carriers;standards;test methods;wafer transport;

Abstract:  This document from the 304-501 project is a high level test
methodology (not a test plan) for overhead wafer carrier
transport systems, both monorail/hoist vehicle and overhead
conveyor designs. The methodology addresses overhead transport
systems (OTS) for wafer carriers from more of a performance-based
testing standpoint than the existing Overhead Hoist Transport
Test Plan developed by the International 300 mm Initiative
(I300I).

To Document

© Copyright 2008 SEMATECH, Inc.
Please read these important Trademark and legal notices