SEMATECH DOC ID #: 01054118A-XFR

Title: Call for Improved Ultra-Low Background Alpha-Particle Emission Metrology for the Semiconductor Industry

Author(s): Eric Smith;Robert Baumann;

Document date: 05/14/2001

Descriptor(s): critical dimension;metrology equipment;particle detection;soft error rate;suppliers;

Abstract:  This paper is intended to help the semiconductor industry develop and
communicate a consensus position for suppliers for improved, ultra low
alpha-particle emission metrology equipment. The statement of need includes
technical appendixes on the critical detection limit, targeted energy range
and sample area.

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