00114018B-XFR Abstract: 300 mm Equip Base Software Functionality Req. - Error Handling and Extended Scenarios: Selete/ISMT CIM Base Functionality Req. Phase 2, Rev. 2.0

SEMATECH DOC ID #: 00114018B-XFR

Title: 300 mm Equip Base Software Functionality Req. - Error Handling and Extended Scenarios: Selete/ISMT CIM Base Functionality Req. Phase 2, Rev. 2.0

Author(s): B. Crandell;D. Bloss;G. Crispieri;K. Gartland;L. Pivin;M. Fujita;P. Cross;T. Katsuyama;T. Masui;T. Miki;Y. Kominato;Y. Ohyama;

Document date: 12/17/2001

Descriptor(s): 300 mm wafers;automated materials handling;computer integrated manufacturing;equipment performance;factory automation;failure analysis;software integration;standards;

Abstract: Selete and International SEMATECH (ISMT) are working together in
a collaborative effort to support the implementation of 300 mm
software requirements. The joint effort has resulted in a set of
base equipment functional requirements and sample base equipment
operational scenarios that encompass common requirements from the
IC maker community. The resulting work is intended to provide
guidance to equipment suppliers on the interpretation and
application of the Computer Integrated Manufacturing (CIM) Global
Joint Guidance and SEMI standards. The effort will provide
reduced variations in operational requirements and encourage
consistent implementations across all equipment. This document
describes the operation and implementation of production equipment
to help suppliers interpret the CIM Global Joint Guidance and SEMI
standards. Only the most common configurations of production
equipment are included; not all IC maker requirements or equipment
types are covered. This revision reflects modifications to the
scenarios based on standards updates.

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