SEMATECH DOC ID #: 00063970A-ENG

Title: 300 mm Automation Software Compliance Testing

Author(s): Gino G. Crispieri;

Document date: 06/30/2000

Descriptor(s): 300 mm wafers;automation;CIM;equipment modeling;equipment performance;equipment reliability;software reliability;

Abstract:  With the adoption of new standards and guidelines for automation in 300 mm
factories, new requirements have been placed on equipment software
communication and control. These new requirements need to be verified for
compliance and performance. The Equipment Integration and Automation Testing
Users Group (EIATUG) was created under the direction of the Factory
Integration Working Group (FIWG) in the Manufacturing Methods and
Productivity Division to define and make available to the industry test
scripts to verify new standard-defined functionality compliance. This
document presents a list of documents created under the EIATUG guidance
through a contract with two software testing suppliers.

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