00053953D-XFR Abstract: 300 mm Equip Base Software Functionality Req-Fixed Buffer and Internal Buffer Type Equip: Selete/ISMT CIM Base Functionality Req, Phase 1 Rev. 2.0

SEMATECH DOC ID #: 00053953D-XFR

Title: 300 mm Equip Base Software Functionality Req-Fixed Buffer and Internal Buffer Type Equip: Selete/ISMT CIM Base Functionality Req, Phase 1 Rev. 2.0

Author(s): Blaine Crandell;David Bloss;Gino Crispieri;JS Chou;Karl Garland;Margaret Pratt;Peter Cross;Satoshi Kono;Tomoyuki Masui;

Document date: 12/17/2001

Descriptor(s): 300 mm wafers;CIM;factory modeling;software requirements;standards;

Abstract: This revised document provides guidance to equipment suppliers on
interpreting and implementing global standards on computer
integrated manufacturing (CIM) in 300 mm facilities. It is the
result of a collaborative effort between Selete and International
SEMATECH (project 304-500) to support the implementation of 300
mm software requirements. This collaboration is intended to
reduce operational requirements and encourage consistent
implementations in 300 mm semiconductor manufacturing equipment.
It includes information on factory layout, base functional
requirements, base operational procedure, and base communication
control. The collaborative effort has been divided into phases.
This revision adds Phase 4, which updates the documents based on
SEMI 0301 standards for publication completeness.

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