SEMATECH DOC ID #: 00053952A-XFR

Title: Equipment Performance Management User Requirements Document

Author(s): Nehal Desai;Takayuki Wakabayashi;

Document date: 06/12/2000

Descriptor(s): automated materials handling;equipment performance;wafer size conversion;

Abstract:  This document provides user-level requirements for the capabilities needed to
analyze and improve overall equipment performance in a semiconductor factory.
The objective of these requirements, collectively called Equipment
Performance Management (EPM), is to maintain and improve throughput,
reliability and turnaround time for production and automated material
handling (AMH) equipment. A list of revisions to these requirements is
included.

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