SEMATECH DOC ID #: 00043939A-ENG

Title: Utility Consumption Characterization Protocol for Semiconductor Tools

Author(s): Ray McKaskle;Scott Hinson;Tom Huang;

Document date: 07/28/2000

Descriptor(s): electric current;manufacturing;measuring instruments;power consumption;procedures;

Abstract:  This document contains a measurement protocol to characterize power and
energy requirements of semiconductor tools. The protocol addresses specific
requirements for measurements and provides electrical fundamentals for data
interpretation and analysis. A field guidance document is also included for
conducting power, exhaust, and water measurements at the tool.

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