SEMATECH DOC ID #: 00023913A-TR

Title: Equipment Performance Metrics for 300 mm Backend Equipment

Author(s): Vivek Bakshi;

Document date: 05/08/2000

Descriptor(s): 300 mm wafers;equipment performance;wafer size conversion;wafer carriers;probes;minienvironments;

Abstract:  This document represents the expectations of the International 300 mm
Initiative (I300I) member companies for the performance of 300 mm backend
equipment. Only wafers are covered in this document. The I300I Backend Wafer
Prober Study Group developed these expectations by consensus in 1999.

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