SEMATECH DOC ID #: 99113848B-ENG

Title: 300 mm Factory Layout and Material Handling Modeling: Phase II Report

Author(s): Elizabeth Campbell;Jim Ammenheuser;

Document date: 06/28/2000

Descriptor(s): factory modeling;fab design;300 mm wafers;equipment performance;equipment modeling;automated materials handling;

Abstract:  This report describes the follow-up activities to Phase I of the 300 mm
Factory Modeling Project. This report covers the approaches used in setting
up the base model as well as selected experimental results. Models were run
to compare the results of variations to the factory layout, non-product wafer
loading, hot lot loading, automated material handling equipment downtime,
buffer capacities, and number of stockers.

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