SEMATECH DOC ID #: 99093826A-TR

Title: Unified Equipment Performance Metrics for 0.18 Micron Technology

Author(s): Frank Robertson;Kiroyoshi Komiya;

Document date: 11/18/1999

Descriptor(s): 300 mm wafers;equipment performance;cost of ownership;0.18 micron;wafer size conversion;

Abstract:  The Unified Equipment Performance Metrics for 0.18 um Technology represents
consensus between the International 300 mm Initiative (I300I), Selete, and
their respective member companies. All of the 17 equipment types discussed by
I300I and Selete now have modified metrics that represent the 1999 production
standard. Values for defects have been agreed upon using 0.20 um and 0.09 um
defect sizes. The Cost Resource Model and data have been aligned. A supplier
is expected to demonstrate equipment performance to metrics.

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